publication
Title
Examination of the Hydrogen Incorporation into Radio Frequency-Sputtered Hydrogenated SiNx Thin Films
Year
2021
DOI
10.3390/coatings11010054
Authors
Judith Mihály
Examination of the Hydrogen Incorporation into Radio Frequency-Sputtered Hydrogenated SiNx Thin Films
(2021)
Nikolett Hegedüs
,
Riku Lovics
,
Miklós Serényi
,
Zsolt Zolnai
,
Péter Petrik
,
Judit Mihály
,
Zsolt Fogarassy
,
Csaba Balázsi
,
Katalin Balázsi
Coatings 11/1
p54
MDPI AG
DOI:10.3390/coatings11010054