| publication |
| Title | Examination of the Hydrogen Incorporation into Radio Frequency-Sputtered Hydrogenated SiNx Thin Films |
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| Year | 2021 |
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| DOI | 10.3390/coatings11010054 |
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| Authors | Judith Mihály |
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Examination of the Hydrogen Incorporation into Radio Frequency-Sputtered Hydrogenated SiNx Thin Films (2021)Nikolett Hegedüs, Riku Lovics, Miklós Serényi, Zsolt Zolnai, Péter Petrik, Judit Mihály, Zsolt Fogarassy, Csaba Balázsi, Katalin Balázsi Coatings 11/1 p54
MDPI AG DOI:10.3390/coatings11010054